Getters are materials widely used in industry to create and maintain vacuum. To realise ultra-high vacuum at low temperatures, a new technology has been developed based on the Non-Evaporable Getter (NEG) thin film coatings. These coatings, produced by sputtering, may recover their chemical reactivity (i.e. pumping function) by heating at temperature as low as 180 °C.
NEG thin-film coatings have been developed for the LHC project and have been already tested in a real accelerator at ESFR - Grenoble and ELECTRA-Sincotrone Trieste.
Please see related information here on Palladium thin-film coatings.